Controlling etch tools using real-time fault detection and
classification
Micro Magazine, March 2005
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Knowledge-Based Process Control For Fault Detection and Classification
Semiconductor Manufacturing; October 2003, p132
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article
Knowledge-based process control for fault detection
SPIE Advanced Process Control and Automation, Vol 5044, PP139-149, 2003.
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Knowledge Based Process Control
Improving producitivity and increasing product yield
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Achieving process control through direct measurement of plasmas
Solid State Technology, November 2001
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