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Controlling etch tools using real-time fault detection and
classification
Micro Magazine, March 2005
view article
Knowledge-Based Process Control For Fault Detection and Classification
Semiconductor Manufacturing; October 2003, p132
view
article
Knowledge-based process control for fault detection
SPIE Advanced Process Control and Automation, Vol 5044, PP139-149, 2003.
view article
Knowledge Based Process Control
Improving producitivity and increasing product yield
view white paper
Achieving process control through direct measurement of plasmas
Solid State Technology, November 2001
view article
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Straatum Launches Imprint MX3 with
Multiple Advanced Sensors, Portable Fault Libraries &
Real-time, Yield Enhancing FDC for Chipmakers
Read more
Irish Software Association
Honors Straatum with Technical
Innovation Award
for Imprint MX2
Read more
Straatum Launches Imprint MX2,
World’s First Truly Scalable Yield-Enhancing Real-Time
FDC System for Chipmakers
Read more
Straatum gets third round funding
from ACT, Intel, Vision
Read more
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